SM5611/SM5612
2001-2002
Silicon Microstructures, Inc.
♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA
Tel: 408-577-0100
♦ Fax: 408-577-0123 ♦ Sales@Si-Micro.Com ♦ WWW.Si-Micro.Com
CHARACTERISTICS FOR SM5611/SM5612 - SPECIFICATIONS
Test Conditions: Model SM5611 w/excitation = 1.500mA @ 25
oC, Model SM5612 w/excitation = 10.00Vdc @ 25 oC, unless otherwise specified.
Min.
Typ.
Max.
Units
Notes
Excitation
Current (SM5611)
0.00
1.50
3.00
mA
Voltage (SM5612)
0.00
10.00
20.00
V
Output
Span (SM5611)
75.0
105.0
150.0
mV
1
Span (SM5612)
39.5
40.0
40.5
mV
2
Offset
-2.00
±0.20
2.00
mV
Temperature Performance
TC Span
-0.5
±0.2
0.5
%FS
3
TC Offset
-0.5
±0.2
0.5
%FS
3
Temp Hysteresis
±0.1
%FS
Accuracy
Linearity
-0.10
±0.05
0.10
%FS
4
Repeatability
-0.10
±0.05
0.10
%FS
Pressure Hysteresis
-0.10
±0.05
0.10
%FS
Sensitivity Matching
-2.00
±0.20
+2.00
%FS
1, 5
Impedance (SM5611)
Z Input
1.80
3.00
3.80
k
Ω
Z Output
2.70
3.30
3.80
k
Ω
Impedance (SM5612)
Z Input
4.50
8.00
25.00
k
Ω
Z Output
2.00
2.50
3.80
k
Ω
Temperature Range
Calibration
0
60
°C
Operating
-40
125
°C
Storage
-55
125
°C
Dynamic Characteristics
Proof Pressure
3X or 225 PSI, whichever is less
FS Pressure
Burst Pressure
5X or 225 PSI, whichever is less
FS Pressure
Notes:
1.
Positive Pressure is defined as entry on the bottom side of the die; gain, during factory calibration, is set using negative pressure
2.
Output span of unamplified sensor
3.
Measured over a temperature range of 0 to 60 oC.
4.
Best fit straight line
5.
Sensitivity matching relates to part-to-part matching
Circuit Configuration for SM5611
Pressure Ranges
PSI
5611/ 5612
5
005
15
015
30
030
60
060
100
100
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any circuits described
herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this publication has been checked, no
responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to cause failure of
a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Model 5611 Pin-out
Model 5612 Pin-Out
1 -Signal Out
1 -Signal Out
2 -Iexc
2 -Vexc
3 +Signal Out*
3 +Signal Out*
4 +Iexc
4 +Vexc
5 Gainset Resistor
5 Do Not Connect
6 Gainset Resistor
6 Do Not Connect
*Output increases as pressure is increased on Positive
Differential Tube or Absolute Tube
DO NOT connect to “Do Not Connect” pins
Notes:
- All dimensions are shown in inches
- Tolerance on all dimensions + 0.005” unless otherwise specified.
Pin Configuration
Rev 1.2 8_02
ORDERING INFORMATION: