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www.sensortechnics.com
FMA Series
Mass flow sensors for gases
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PERFORMANCE CHARACTERISTICS
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FLOW SENSOR CHARACTERISTICS4
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Notes:
1 sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm
2 SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.
3 Output voltage is ratiometric to supply voltage
4 A 5 micron filter is recommended for all devices.
5 Maximum allowable rate of flow change to prevent damage.
6 Shift is relative to 25 °C.
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