By ensuring SEMI F47 compliance of AC powered IEC contactors

and relays, the Low Voltage Ride Through Modules can be used to

increase the voltage sag immunity of semiconductor processing

equipment. These modules make it possible for AC powered

TELEMECANIQUE contactors and relays to exceed the require-

ments of SEMI F47, both in the magnitude and duration of a

voltage sag event – even with accessories such as auxiliary contact

blocks and pneumatic timers.

More and more wafer fabs are insisting that front-end wafer

processing equipment comply with SEMI F47. Many of the

contactors and pilot relays used on equipment, particularly in

the EMO circuit, are not able to meet the standard. As a result,

equipment can drop out during a voltage sag of 50% in magnitude

and 200ms in duration, causing equipment shutdown.

The Low Voltage Ride Through Modules can be used with

TELEMECANIQUE contactors from 9A through 80A, as well as

the CAD series of control relays.

Key Benefits

■

Easy retrofitting. Modules are compatible with

TELEMECANIQUE contactors 9A through 80A and TeSys

CAD series control relays.

■

Reduced inventory. Each module covers complete contactor

amperage range.

■

Increased flexibility. Available in 24VAC, 120VAC and 208

VAC versions.

■

Unsurpassed operation and performance. Electronics and

8-bit micro-controller optimized to TELEMECANIQUE contactor

and relay coils.

- Overvoltage protection during coil energization

- Surge and fast transient burst protection

- Discerns between 20 ms micro outages and activation

of EMO button for emergency shutdown.

■

Exceeds SEMI F47 ride through standards. Guaranteed

ride through at 45% of nominal voltage, with no restriction on

voltage sag duration, must drop out at 30% of nominal range.

■

Meets industry standards. Modules carry UL, IEC and CE

mark and certified SEMI F47 compliant.

■

Easy installation. Modules mount directly to the top of

contactors – no additional wiring is required.

SEMI F47 Low Voltage Ride Through Module

Minimize voltage sags and increase

machine uptime

LVRT module attached

to TELEMECANIQUE

Contactor

Low Voltage Ride

Through Module (LVRT)